STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 35
INSTALLATION
3
Pump model STP-iXR1606
Flange type
ISO160F
(with O-ring
groove
*1
)
VG150 ICF203 ISO200F ISO250F
Torque reduction
mechanism
Equipped Equipped Not Equipped Not Equipped Not Equipped
Destructive Torque
[kNm]
20.7 20.7 27.7 27.7 27.7
Base securing
(4 positions)
No Yes No Yes No Yes No Yes No Yes
Recommended bolt
Shape
Standard Standard Standard Standard Standard
Size
M10 M10 M8 M10 M10
Q’ty
8 8 20 12 12
Material
*2
Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Carbon steel
Alloyed steel
Stainless steel Stainless steel
Strength
12.9 or more 12.9 or more 12.9 or more 70 or more 70 or more
Special washer
Figure 20 Figure 20 Not necessary Not necessary Not necessary
Pump model STP-iXR1606
Flange type VG200 VG250 ICF253 ICF305
Torque reduction
mechanism
Not Equipped Not Equipped Not Equipped Not Equipped
Destructive Torque
[kNm]
27.7 27.7 27.7 27.7
Base securing
(4 positions)
No Yes No Yes No Yes No Yes
Recommended bolt
Shape
Standard Standard Standard Standard
Size
M12 M12 M8 M8
Q’ty
8 12 24 32
Material
Stainless steel Stainless steel Stainless steel Stainless steel
Strength
70 or more 70 or more 70 or more 70 or more
Special washer
Not necessary Not necessary Not necessary Not necessary
*1 ISO160F flange with torque reduction mechanism equips the o-ring groove for seal on the surface. Do not use O-ring with
centre ring. Use the supplied O-ring.
*2 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054).
Table 7 - Maximum torque predicted and recommended securing bolt for inlet port flange