STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 58
4
OPERATION
Pin Description
Pins for inputting the START signal.
The following two methods are available:
1） Short the circuits between (1)-(21). Then, short the circuits
between (3)-(21) for 0.3 seconds or more.
However, when inputting this START signal simultaneously
with switching "ON" the STP pump, continue to short these
pins for 10 seconds or more.
2） Short the circuits between (1)-(3).
In this case, (21) is not used.
Pins for inputting the STOP signal.
1） When 1) above is used to start the STP pump, open the
circuits between (1)-(21) to stop the STP pump.
2） When 2) above is used to start the STP pump, open the
circuits between (1)-(3) to stop the STP pump.
Pins for inputting the RESET signal.
When a safety function operates, remove the cause of the
abnormality/error after confirming the STP pump has stopped.
When the cause of the abnormality/error is removed, short the
circuits between (1)-(22) for 0.3 seconds or more to reset the
failure signal (The "FAILURE" LED extinguishes).
Pins for inputting the rotation INHIBIT signal.
The input pins are valid even when input operation port is set to
serial port.
When the pins (1)-(5) are opened, the STP pump does not
rotate despite the presence of a start signal. When these pins
are opened while the pump is operating, the pump will stop (see
Section 4.9.3).
When using this function, short the circuits between (1)-(2) of
the rotation INHIBIT enable signal.
Table 12 - X2 REMOTE input signal pins
(1) (21) (3)
COM STOP IN START IN
(1) (3)
COM START IN
(1) (21)
COM STOP IN
(1) (3)
COM START IN
(1) (22)
COM RESET IN
(1) (5)
COM INHIBIT IN
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