Edwards STP-L301 Series

STP-L301/L451 Series Instruction Manual
9
TABLE of CONTENTS
SAFETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump.........................1-1
1.1 Usable Gases..................................................................................................................1-1
1.2 Precautions on Maintenance and Inspection...................................................................1-1
1.3 Labels..............................................................................................................................1-2
2 Operation Principle of the STP Pump ...........................................2-1
3 Unpacking .....................................................................................3-1
3.1 Unpacking the STP Pump and the STP Control Unit ......................................................3-1
3.2 Accessories.....................................................................................................................3-1
4 Installation of the STP Pump.........................................................4-1
4.1 Name and Function of Each Part ....................................................................................4-1
4.2 Precautions before Installation ........................................................................................4-3
4.2.1 Operating Environment .......................................................................................4-3
4.2.2 Installation Area ..................................................................................................4-4
4.2.3 Bench..................................................................................................................4-4
4.3 How to Install the STP Pump ..........................................................................................4-5
4.3.1 Cleaning the Seal................................................................................................4-6
4.3.2 STP Pump Installation Positions .........................................................................4-7
4.3.3 How to Secure the STP Pump ............................................................................4-8
4.3.4 Vacuum Piping..................................................................................................4-12
4.3.5 Connecting the Ground Cable...........................................................................4-13
4.3.6 Connecting the Purge Port (For the Chemical Specific Pump, Type C)............4-14
5 Baking, Cooling the STP Pump and Gas Pumping .......................5-1
5.1 Baking the STP Pump .....................................................................................................5-1
5.1.1 Attaching a Baking Heater ..................................................................................5-1
5.2 Cooling the STP Pump....................................................................................................5-2
5.2.1 Water Cooling Method ........................................................................................5-2
5.2.2 Air Cooling Method..............................................................................................5-3
5.3 Gas Suction.....................................................................................................................5-4
5.3.1 How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)].............5-4
6 Installation of the STP Control Unit ...............................................6-1
6.1 Name and Function of Each Part ....................................................................................6-1
6.1.1 Front Panel .........................................................................................................6-1
6.1.2 Rear Panel ..........................................................................................................6-3
6.1.3 Top Panel............................................................................................................6-5
6.1.4 Side Panel (Left side)..........................................................................................6-6
6.2 Precautions before Installation ........................................................................................6-7
6.2.1 Operating Environment .......................................................................................6-7
6.2.2 Insulation Test.....................................................................................................6-7