STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page viii
PAGE
viii
TABLES
Table Title Page
1 Environmental requirements for installation 20
2 Eyebolt size 23
3 Pump functions 27
4 Control unit front panel functions 29
5 Control unit front panel functions (continued) 30
6 Tightening torque of bolt 34
7 Maximum torque predicted
and recommended securing bolt for inlet port flange 35
8 Power cable 39
9 Starting/stopping the STP pump (X2 REMOTE) 54
10 Reset Operation (X2 REMOTE) 55
11 LED Indications for each state 56
12 X2 REMOTE input signal pins 58
13 X2 REMOTE input signal pins (continued) 59
14 Input operation port setting 61
15 Rotation INHIBIT signal input 62
16 Second speed function 63
17 X2 REMOTE output signal pins 65
18 X2 REMOTE output signal pins (continued) 66
19 Rated contacts for relays CR1 to CR8 67
20 X3/X4 pin position 70
21 Communication parameters 73
22 Input operation port 74
23 Serial communication time out setting 75
24 Transmission control characters 80
25 Pump operation commands 88
26 Command list 93
27 Pump operation commands 95
28 Error message values 97
29 Error message values (continued) 98
30 Pump operation mode 100
31 Remote mode 105
32 Warning value bit assign 109
33 Parameter setting value 114
34 Option function number and parameter list 124
35 Option function number and parameter list 126
36 Functions of STP-Link 129
37 States of LEDs and X2 REMOTE output signals
at power failure 132
38 WARNING function 134
39 Default setting of WARNING function 138
40 Factory Setting and Variable Range 138
41 Priority of failure signal 140
42 Error List 141
43 Error List (continued) 142
44 Error List (continued) 143
45 Error List (continued) 144
46 Error List (continued) 145
47 Error List (continued) 146
48 Troubleshooting with no indication of the "FAILURE" LED 147
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