Edwards STP-L301 Series

STP-L301/L451 Series Instruction Manual
13-1
Specification
13 Specifications and Accessories
13.1 Specifications of the STP Pump
Table 13.1 Specifications of the STP Pump
Item STP-L301 series STP-L451 series
Inlet port flange ICF152/VG100/ISO100 ICF203/VG150/ISO160
Flange size
*1
Outlet port flange KF25
N
2
L/s 260 450
He L/s 260 460
Pumping speed
*2
H
2
L/s 290 410
N
2
>10
8
He
5×10
5
Compression ratio
H
2
2×10
4
Ultimate pressure Pa (Torr) 10
-6
Order (10
-8
Order)
Maximum working pressure Pa (Torr)
6.7×10
-2
(5×10
-4
)
: Natural air cooling
Allowable backing pressure Pa (Torr) 13 (0.1) : Natural air cooling
Flow rate of purge gas Pa•m
3
/
s
(SCCM)
1.7×10
-2
（10）
Rated speed rpm 25,000 to 48,000
Starting time min 3
Stopping time min 3
Vibration
μm O-P
< 0.001 (at 48,000 rpm)
Noise dB < 50 (at 48,000 rpm)
Baking temperature
°C
<120
Lubricating oil Not necessary
Installation position Free
Cooling method
Natural air cooling
(Water/air cooling: for baking/gas suction)
Standard backing pump L/min 240
Mass kg 13 14
Dimensions mm
φ180×240 (ISO100) φ214×250 (ISO160)
φ185×240(VG100) φ235×250(VG150)
φ180×260(ICF152) φ214×270(ICF203)
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
– 25 to + 55
The values shown in the table are typical; they are not guaranteed.
*1
:ICF (JVIA standard), VG, KF (JIS)
*2
: At 48,000 rpm. The performance varies with the rated speed