Edwards STP-L301 Series

STP-L301/L451 Series Instruction Manual
10
6.2.3 Installation Area ..................................................................................................6-8
6.3 Attaching the STP Control Unit Front Panel to a Rack ....................................................6-9
6.4 Cable Connection..........................................................................................................6-10
6.4.1 Name and Dimensions of Each Cable ..............................................................6-10
6.4.2 How to Connect the Cables ..............................................................................6-12
6.5 Connecting to Semiconductor Equipment .....................................................................6-15
6.5.1 Connecting to Power.........................................................................................6-15
6.5.2 Emergency off Circuit (EMO Circuit) .................................................................6-15
7 How to Start/Stop the STP Pump ..................................................7-1
7.1 Before Starting ................................................................................................................7-1
7.2 Start Procedures .............................................................................................................7-2
7.3 Stop Procedures..............................................................................................................7-2
7.4 Manual Operation............................................................................................................7-3
7.4.1 Powering ON.......................................................................................................7-3
7.4.2 Starting the STP Pump .......................................................................................7-3
7.4.3 Stopping the STP Pump......................................................................................7-3
7.4.4 Starting the STP Pump after Stopping ................................................................7-4
7.4.5 Powering OFF.....................................................................................................7-4
7.4.6 Starting the STP Pump after a Safety Function Operates...................................7-4
7.5 Remote Operation (I/O TB2) ...........................................................................................7-5
7.5.1 Powering ON.......................................................................................................7-5
7.5.2 Starting/Stopping the STP Pump ........................................................................7-5
7.5.3 Starting the STP Pump after Stopping ................................................................7-6
7.5.4 Powering OFF.....................................................................................................7-6
7.5.5 Starting the STP Pump after a Safety Function Operates...................................7-6
7.6 Remote Operation (CON4: Optional Accessory) .............................................................7-7
7.6.1 Powering ON.......................................................................................................7-7
7.6.2 Starting/Stopping the STP Pump ........................................................................7-7
7.6.3 Starting the STP Pump after Stopping ................................................................7-8
7.6.4 Powering OFF.....................................................................................................7-8
7.6.5 Starting the STP Pump after a Safety Function Operates...................................7-8
8 Remote Input/Output Signal Terminal Blocks................................8-1
8.1 I/O TB1 Terminal Block ...................................................................................................8-1
8.2 I/O TB2 Terminal Block ...................................................................................................8-5
8.3 CON4 Connector (Optional accessory) ...........................................................................8-7
8.3.1 Remote Input Signals..........................................................................................8-7
8.3.2 Remote Output Signals .......................................................................................8-9
8.3.3 Remote Cables (Optional Accessories) ............................................................8-11
9 Adjustment Method .......................................................................9-1
9.1 Tuning .............................................................................................................................9-1
9.1.1 Tuning Method ....................................................................................................9-1
9.2 Setting the Rated Speed .................................................................................................9-3
9.2.1 When Setting DSW-B No.1 to ON under Power-ON State..................................9-3
9.2.2 When Setting DSW-B No.1 to ON before Powering On ......................................9-4
10 Safety Functions .........................................................................10-1