Maintenance 9. Bellows
138 LS Rev.10
9. Bellows
The bellows for LS3-401C are provided in a unit of one piece. The upper and lower
bellows have the same shape.
The bellows for LS6-**2C are provided in a unit of two pieces. The shape varies
between the upper and lower bellows.
A large amount of dust is emitted when replacing the bellows.
Take the Manipulator to an outer room such as the room in front of the clean room’s
entrance, or take the necessary countermeasures to prevent dust emission before removing
the bellows.