FINEPLACER
®
lambda
Rev-Nr. 1.1
5. Place up the nonius
After the placement you will see that the structure is not in back focus.
Remember the z height of the xyz-table and bring the structure into back focus to
check the placement accuracy. Make a screen shot if the placement accuracy is not
within specification.
Bring back the table into the z height that you made a note of before and pick up the
glass again.
You should get a sharp image of both nonius glasses in backfocus again and the
glasses should have a good alignment to each other.
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