MKS 246C - Remote Flow Control

System Configurations Cha
p
ter Two: Installation
30
Remote Flow Control
Remote flow control can be accomplished using TTL logic control. The MFC Interface
connector J8 provides the means to remotely turn the flow on/off and to adjust and monitor the
flow rate using a set point signal from an external voltage. Refer to Table 8, page 34, for the
MFC Interface connector pinout. Refer to
How To Control Gas Flow with TTL Logic
, page 66,
for more information.