MKS 653B - Page 6

Table of Contents
iv
Safety Precautions .........................................................................................21
Cleaning the Valve.....................................................................................................22
Appendix A: Product Specifications.......................................................................................23
General Specifications................................................................................................23
Appendix B: ASA Series Flange Specifications .....................................................................25
Appendix C: ISO-NW Series Flange Specifications...............................................................27
Appendix D: CF Series Flange Specifications........................................................................29
Appendix E: JIS Series Flange Specifications........................................................................31
Index ......................................................................................................................................33