Chapter 5: Environmental Control System
5063666 K 59
Filling the Humidifying Column
The humidifying column uses ultrapure water to add humidity to the air flow supplied to the
environmental control cassette.
The humidifying column holds 130ml (4.4oz) of ultrapure water, which is enough to
continuously provide humidity for up to three or four days. When the water level approaches
the minimum indicator (approximately one-third full), add 18 Mohm•cm ultrapure water to reach
the maximum level.