Olympus AL120-12 Series - Wafer Transfer to Vacuum Stage

Maintenance Manual Test Programs
3-13
Page
[M2]：Move continuously at the same height as that in normal transfer after the F-arm is raised <Normal
height>
Press the [Start] button.
Select the operation speed using the menu buttons on the liquid crystal panel.
[M1]: High speed <Fast speed> [M2]: Medium speed <Middle speed>
[M3]: Low speed <Slow speed>
• If you do not specify anything here, the loader will operate at the high speed [M1]: High speed
<Fast speed> setting.
Press the [Start] button, and the loader starts the operation.
If the loader has not been initialized, initialization starts.
①Move the F-arm horizontally (Horizontal middle point position → Macro position)
②Raises the F-arm (Lower limit → Upper limit)
③Move the F-arm horizontally (Macro position → Stage position)
④Lowers the F-arm (Upper limit → Middle point)
⑤Move the F-arm horizontally (Stage position → Horizontal middle point position)
⑥Lowers the F-arm (Middle point → Lower limit)
The loader then repeats steps ① to ⑥.
・ Press the [Start] button to pause the operation at the break point.
・ The speed can be changed during the pause.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・ The above operation pattern indicates the F1-arm (upper side) operation.
・ Press the [Quit] button, and the F-arm returns to its initial position and the loader stops the
operation.
No. 10
Centering
sensor count
check
<Centering sensor count check>
This program can be used to check the centering sensor count state.
Press the [Start] button.
① Initialized.
② Press the interlock switch and the [Start] button.
③ FOUP Door open.
④ When the door opens completely, release your hand from the interlock switch and press the [Start]
button. (② to ④ are for AL120-LMB12-LP3 only.）
⑤ Raises the A-arm and turns the horizontal drive motor OFF.
⑥ Set a wafer on the A-arm so that it is in virtually the same position as during transfer.
⑦ Press the [M2] button <Vacuum valve change> to hold the wafer.
⑧ Press the [M3] button<Search>, and press the[START] button.
The A-arm moves horizontally and the value detected by the centering sensor is displayed on the
liquid crystal panel.
The following four items are displayed:
S1:#1 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
S2:#2 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
S3:#3 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
S4:#4 Displacement of the detected position toward the front of the sensor [um],
displacement of the detected position toward the back of the sensor [um]
#3 and #4 are displayed only on the AL120-6, not displayed on other models.