Test Programs Maintenance Manual
The centering sensor detection state is indicated by the LED ON/OFF state of the Wafer No. selector
button.
#1 centering sensor detection ON:OFF
#2 centering sensor detection ON:OFF
#3 centering sensor detection ON:OFF
#4 centering sensor detection ON:OFF
• Press the [M3] button, and turns the horizontal drive motor OFF.
• If the cassette is installed on the cassette installation part, the operation does not start.
• Press the 4-way button [RIGHT] to start initialization in the horizontal direction of the A-arm.
• When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
• Press the [Quit] button, the A-arm returns to its initial position. Then, if you press the [Start] button or
the [Quit] button while pressing the interlock switch of the FOUP opener, the FOUP door closes and
the loader stops the operation. (AL120-LMB12-LP3 only) and the A-arm return to their initial
positions, and the loader stops the operation.
Vacuum turns OFF automatically.
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