Olympus AL120-12 Series - Stopping and Pausing Operations

Maintenance Manual Test Programs
3-15
Page
No. 11
Wafer
mapping
sensor
height check
*Applicable
to
AL120-LMB1
2-F only
<Mapping parameter check>
This program can be used to adjust the mapping sensor.
Press the [Start] button, and select the item to adjust by using the menu buttons on the liquid crystal
panel.
[M1]: Automatically adjust mapping parameters <Mapping auto adjust>
[M2]: Execute mapping and display results <Mapping result display>
[M3]: Manually input mapping parameters <Input parameter>
[M4]: Check the origin position <Origin sensor check>
[M1]: Automatically adjust mapping parameters <Mapping auto adjust>
The mapping parameters can be adjusted automatically.
Using the 4-way button, select the number of the wafer type to adjust or register from the list of wafer
type numbers displayed on the liquid crystal panel, and then press the [Start] button.
①Insert the wafers to be set into the lowest and highest slots of a cassette.
②Press the [M1] button. The mapping is executed.
If the loader displays that the mapping data is <Result>: OK, press the [M2] button to register the data.
[M1]: Execute the automatic mapping adjustment <Adjust mapping>
[M2]: Register the results of automatic mapping adjustment <Save>
[M2]: Execute mapping and display results <Mapping result display>
This program can be used to check for normal detection when mapping is executed based on the
registered data.
[M1]: Execute mapping <Mapping>
[M2]: Display mapping results <Display result>
[M1]: Execute mapping <Mapping>
Using the 4-way button, select the number of the wafer type to adjust or register from the list of wafer
type numbers displayed on the liquid crystal panel, and then press the [Start] button.
①Insert all wafers to be confirmed into the cassette.
②Press the [M1] button. The mapping is executed.
[M2]: Display mapping results <Display result>
①Press the [M2] buttons to display the results on the liquid crystal panel.
The results displayed include the results of judgments for each slot (Pass/Fail), center position of a
wafer <P>, and wafer thickness <Thick>.
[M1]: Next page <PageUp>
[M2]: Previous page <PageDn>
[M3]: Terminate display <Exit>