Test Programs Maintenance Manual
Notch
alignment
adjustment
<Notch alignment adjustment>
This program can be used to check and adjust the notch positions f.
① Insert a wafer into any slot of a cassette. and place the cassette on the cassette installation part.
② Using the 4-way button, select the number of wafer type to adjust or register from the list of wafer
type numbers displayed on the liquid crystal panel, and then press the [Start] button.
(Registration is done for each wafer diameter. Registration for each wafer thickness is not
available.)
③ Mapping is performed and the [Wafer No.] button for a slot in which there is a wafer blinks.
Press the [Wafer No.] button to specify the slot into which the wafer to be adjusted has been
inserted. The [Wafer No.] button for the selected slot stops blinking and stays lit.
④ Press the [Start] button.
⑤ The selected wafer is loaded from the cassette.
⑥ Adjust the notch positions.
Data saved in the internal memory is displayed on the liquid crystal panel.
<CW/CCW 00>
⑦
Set the notch position setting knob in the direction you want to adjust the notch alignment.
⑧ Correct the notch alignment position. Save the correction data in the internal memory.
Use the 4-way button to correct the position.
4-way button [RIGHT]: Clockwise
4-way button [LEFT]: Counterclockwise
One pulse: About 0.1 degree
⑨ Register the correction value.
[M1]: Register <Save>
⑩ Press the [Start] button to repeat steps to .
• If you do not press [M1] button but press the [Quit] button instead, the wafer is unloaded into the
cassette without saving the data.
• Use the [Wafer alignment] control for adjusting the orientation flat positions.
• Correction data must be registered separately for each direction of notch.
• [M3] ：Unload
• [M4] ：Load
No. 16
L-arm
rotation
origin
sensor
position
check
< L-arm rotation origin sensor check >
This program can be used to check and adjust the L-arm rotation origin.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：Check the L-arm rotation origin sensor <L-arm rotation check>
[M2]：Check the L-arm wafer support unit <L-arm wafer support unit check>
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