Maintenance Manual Test Programs
[M1]：Check the L-arm rotation <L-arm rotation check>
This program can be used to check the back-side arm rotation origin sensor.
Confirm that there is nothing interfering with the arm.
If the loader has not been initialized, initialization starts.
① The sensor detection state can be checked by the step-operation of the L-arm rotation motor.
• Specify the motor operation using the menu buttons on the operation panel display and the 4-way
button.
4-way button [UP]: Rotate forward by 30 degrees <Forward 30>
4-way button [DOWN]: Rotate backward by 30 degrees <Backward 30>
[M1]: Initialize the L-arm <L rotation initialize>
[M2]: Switch between excitation ON and OFF <Current ON/OFF>
[M3]: Rotate by 90 degrees <Forward 90>
• The sensor state is indicated by the Wafer No. selector button.
The LED on the Wafer No. selector button lights up on the detection of the sensor.
[No. 1]: Origin sensor detection
• Press the [Quit] button, and the L-arm returns to its initial position and the loader stops the
operation.
Do not continue the operation for longer than 5 minutes.
Wait for longer than one minute before restarting the operation.
[M2]： Check the L-arm wafer support unitＬ <L-arm wafer support unit check>
①Set the cassette that contains the wafer.
②
Using the 4-way button, select the number of wafer type to adjust or register from the list of
wafer type numbers displayed on the liquid crystal panel, and then press the [Start] button.
If the loader has not been initialized, initialization starts.
③
Mapping is performed and the [Wafer No.] button for a slot in which there is a wafer blinks.
Use the [Wafer No.] button to specify the slot where the wafer to be adjusted is inserted.
The [Wafer No.] button of the selected slot stops blinking and turns ON.
④Press the [Start] button.
⑤The wafer is loaded from the cassette. After the centering is performed, the L-arm moves to the
upper limit position and then moves horizontally.
⑥Press the start switch, and the L-arm vacuum is canceled.
⑦Press the start switch, and the wafer moves to the Macro table and keeps rotating in increment of 90
degrees.
⑧Press [Start] switch or [Quit] switch, and the loader unloads the wafer to the cassette and stops
operation.
F-arm
horizontal
origin sensor
position
check
< F-arm horizontal origin sensor check >
This program can be used to check the horizontal origin sensor position.
Press the [Start] button.
If the loader has not been initialized, initialization starts.
Select the item to adjust using the menu buttons on the liquid crystal panel.
①The F-arm rises.
4-way button [Right]：0.25mm Move to the stage side
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