Olympus AL120-12 Series - Page 53

Maintenance Manual Test Programs
3-25
Page
No. 19
Notch
sensor and
wafer sensor
check
<Notch sensor Mapping sensor check>
This program can be used to check the notch sensor and water sensor operation.
Press the [Start] button.
If the loader has not been initialized, initialization starts.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：Check the notch sensor level <Notch sensor level check>
[M2]：Check the wafer sensor <Wafer sensor check>
*The check of the wafer sensor operation is available for AL120-LMB12-F only.
[M1]：Check the notch sensor level <Notch sensor level check>
Press the start switch. The voltage of the notch sensor level is displayed.
[M2]：Check the wafer sensor <Wafer sensor check> (Applicable to AL120-LMB12-F only)
Press the start switch. The wafer sensor moves to the first wafer insertion height. If the wafer sensor
does not detect the target object, the buzzer is heard.
No. 20
Stage lock
and
observation
window lock
movement
check
<Stage lock movement check>
<Stage and window lock movement check> (AL120-LMB12-LP3)
This program can be used to check the notch sensor and wafer sensor operations.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：Check the stage lock <Stage lock movement check>
[M2]：Check the observation window lock movement <Window lock movement check> (Applicable to
AL120-LMB12-LP3 only)
[M1]：Check the stage lock <Stage lock movement check>
Lock and Unlock is switched each time the start switch is pressed.
[M2]
：
Check the observation window lock movement <Window lock movement check>
Lock and Unlock is switched each time the start switch is pressed.
No. 21
LED lamp
check
<LED lamp check>
This program can be used to check that the LED lamps light up.
Press the [Start] button.
・All the LED lamps on the operation panel blink. (The buzzer sounds at the same time.)
・The liquid crystal panel backlight blinks.
・The stage transfer permission lamp (LED) blinks.
・Press the [Quit] button, and the loader returns to its initial state and stops the operation.