Test Programs Maintenance Manual
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Transfer speed <Speed> SP1 to SP5
A-arm horizontal speed <A-arm linier speed> ..................... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
A-arm vertical speed <A-arm up down speed> ............... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
L-arm rotation speed <L-arm rotation speed>.................. High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
L-arm vertical speed <L-arm up down speed> ................ High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
Macro table rotation speed <Macro table rotation speed> ........ High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
Macro table vertical speed <Macro table up down speed> ....... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
F-arm horizontal speed <A-arm linier speed> ..................... High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
F-arm vertical speed <F-arm up down speed> ................ High speed <Fast> / Medium speed <Middle> / Low speed <Slow>
No. 25
Wafer
unloading
position
adjustment
<Retracted position adjustment>
This program can be used to adjust the position where wafers are unloaded into the cassette to the
near side (cassette opening side).
This prevents unloaded wafers from hitting against the inside of the cassette.
①Insert wafers into any slot of a cassette, and set the cassette.
②Using the 4-way button, select the number of the wafer type to adjust from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
If the loader has not been initialized, initialization starts.
③The mapping is executed and the [Wafer No.] button of the slot that contains the wafer blinks.
Use the [Wafer No.] button to specify the slot where the wafer to be adjusted is inserted.
The [Wafer No.] button of the selected slot stops blinking and turns ON.
④Press the [Start] button to decide the wafer to be loaded. The correction value of the unloading
position is displayed on the liquid crystal panel.
⑤Press the [M1] button to load the wafer.
⑥The wafer is unloaded into the cassette.
⑦If <Result>: OK is displayed, press the [M2] button to put the correction data into the internal
memory.
⑧Press the [M1] button to repeat steps③and ⑤.
・Press the [Quit] button to terminate the adjustment.
・Before starting the test, insert wafers into the cassette and push them in until they stop.
(If wafers are already inserted in the cassette, push them in until they stop.)
Position the cassette toward the front as much as possible by taking care that it is inside the range of
the cassette guide clearance.
・Correctable range: 0 to 5 mm
No. 26
Software
Version,
error log
display
and
operation
settings
<Condition setting and Error log disp>
This program can be used to set the loader operation, check the software version and set the time.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：Set the loader operation <Loader settings>
[M2]：Check the error log and software version.<Version and error log display>
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