Olympus AL120-12 Series - Full Inspection Sequence

Maintenance Manual Test Programs
3-27
Page
24
Wafer out sensor
<WafarOut>U109
Wafer sensor vertical motor driver
MO <E MO>
25
26
No. 24
Wafer
type
setting
<Wafer parameter setting>
This program can be used to register wafer types, and set and change the size, thickness and transfer
speed for each wafer type.
Press the [Start] button.
The registered wafer types are displayed on the liquid crystal panel.
① Specify the item to modify or add, and press the 4-way button [RIGHT].
• Modify: Move the <×> to the item to modify by using the 4-way button.
• Add: Move the <×> to the item to add by using the 4-way button.
② Move to the setting item by using the 4-way button, and change the value by using the up and down
buttons.
③ Move to the comment item by using the 4-way button, and changes into the comment input screen
in the [M3] button <Edit>.
Settable items
• Wafer size <Size> :300/---
Normally, the wafer size can be set to any size appropriate for your wafer loading operation.
Standard settings: 300
• When chose ---, the set point is deleted, and it is not displayed to a wafer type screen at the time of
the inspection.
• Wafer thickness <Thick> ：775-500/500-200
* Wafer size and thickness settings may be unavailable, depending on the loader specifications.
• Transfer speed <Speed> :Fast/Middle/Slow/SP1–SP5
SP1 to SP5 can be set to desired speeds for each axis.
Optional speed is limited as follows by wafer thickness <Thick>.
775-500......................... ：Fast/Middle/Slow/SP1～SP5 Normal setting<Fast>
500-200......................... ：Middle/Slow/SP1～SP5 Normal setting <Slow>
• Comment <Comment> ----------- : A-Z, a-z, 1 to 0, space
[M1]：Decision<OK> ........ [M2]：Cancel<Cancel>
[M3]：Back space<BkSpace> [M4]：Exchange<Change>
Capital letter input ... [No.1～No.26]：Input of A to Z
Small letter input ..... [No.1～No.26]：Input of a to z
Number input .......... [No.1～No.9]：Input of 1 to 9, [No.10]：Input of 0, [No.11]：Input of －, [No.12～
No.26]：Input of space
Capital letter input, small letter input, number input are replaced whenever they push [M4]：Exchange
<Change>.
Up to 16 characters can be entered.
4-way button [UP], [DOWN]: Change the set value of each item
4-way button [LEFT], [RIGHT]: Change the setting item
[M1]: Register <Save>
[M2]: Cancel <Cancel>
[M3]: Detailed settings
When the transfer speed <Speed> is set to SP1 to SP5, press [M3] button <Detail> to open the
detailed setting screen.
When the Comment <Comment> is [M3] button <Edit> to open the comment input screen.