7.
Perpendicularity adjustment of stage
7-l. Adjustment of X (horizontal) direction
7-l-l. Screw jig (SKN0004) into the nosepiece.
7-1
-2. Rotate the jig (SKN0004) to bring it
parallel to X-direction. Bring stage upwards
until bottom surface of jig contacts stage
surface.
7-l-3. Check for equal clearance between the
jig and stage surface with the thickness
gauge (OT0317) at the left or right end.
Maximum telerance between stage surface
and jig surface = 0.15 mm.
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