8. Details of [Analyze] Menu
PV6253-F4E016 39
film thickness measurements in a graph. This graph is displayed as graph data when the
displayed values of film thickness measurement results are pressed with the [Add] button. The
data can be added up to a maximum of 50 points.
8.3.1. [File][Save as] menu
Saves the graph data to the film thickness history data file.
8.3.2. [File][All Clear] menu
Clears all the graph data. When the menu is selected, a confirmation message for the clearing
appears. Pressing the [OK] button there executes the clearing of all data. Pressing the
[Cancel] button cancels the clearing.
8.3.3. [Set][Graph setting] menu
Displays the [Film Thickness Graph Setup] window, where settings for graph indication
are made.
[Automatic scale]
If this option is currently checked, the software will execute automatic scale setting in the
direction of film thickness of a film thickness graph. Every time data is added or deleted, an
appropriate maximum scale is set up, so that the data is displayed over the entire graph. The
values specified in [Min] and [Max] are not used, and the minimum scale value is always 0
[nm].
[Min]
Set the minimum scale value in the direction of film thickness of a film thickness graph
scale. If [Automatic scale] is currently specified, this set value will not be used. The
range for this setting is from 0 to 20000, and a difference of 100 or more from [Max] is
required.
[Max]
Set the maximum scale value in the direction of film thickness of a film thickness graph
scale. If [Automatic scale] is currently specified, this set value will not be used. The
range for this setting is from 0 to 20000, and a difference of 100 or more from [Min] is
required.
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