46
BG 5195 BEN / A (2011-05) TPG261.oi
The display and setpoint adjustment range of the Pirani
Capacitance Gauge can be extended.
Available for:
Measurement range
Pirani Gauge
(TPR)
; Pirani Capacitance Gauge (PCR) 5×10
-5
…1500 mbar
Cold Cathode Gauge
(IKR)
FullRange™ CC Gauge
(PKR)
Process Ion Gauge
(IMR)
FullRange™ BA Gauge
(PBR )
Capacitance Gauge
(CMR)
Piezo Gauge
(APR)
Value
Ö Normal operation.
Ö Display and setpoint adjust-
ment range
extended to
5×10
-5
mbar.
Ö Activate/deactivate the Pirani
range extension.
Pirani range
extension