R301 RF POWER SUPPLY OPERATOR’S MANUAL
Introduction
Thank you for acquiring your new SEREN IPS product. The R301 Radio Frequency Power
Supply has been designed to provide the best value, ease of operation, and reliability for plasma
processing systems. This manual covers specifications, installation, and operation of the R301
RF Power Supply.
Information
To get answers for any questions you might have regarding your plasma or processing system,
please contact your system vendor first. Your system vendor knows the intimate details of how
your equipment interfaces and operates with the R301 RF Power Supply and can efficiently
resolve system related problems.
For questions directly related to the R301 RF Power Supply, you may call us, Monday through
Friday, 8:00am to 5:00pm, United States Eastern Time, at:
1-856-205-1131
Service
For RF Power Supplies purchased with a processing system, or covered under a service contract
from your system vendor, please contact the system vendor to arrange for service.
For after-market or end user customers, a SEREN IPS customer service representative will
arrange for service. Call us, Monday through Friday, 8:00am to 5:00pm, United States Eastern
Time, at: 1-856-205-1131
Please note: Equipment returned to us without prior authorization or without a Return Materials
Authorization (RMA) number visible on the outside of the package will be refused.
How to Contact Us
Our address, telephone, and fax numbers are listed below.
SEREN Industrial Power Systems, Inc.
1717 Gallagher Drive
Vineland, New Jersey, 08360 U.S.A.
Telephone: 856-205-1131
Fax: 856-205-1141
Proprietary Information Notice
This document contains information proprietary to SEREN IPS Inc. This document shall not be
reproduced or its contents disclosed without the written permission of SEREN IPS Inc. This
notice shall appear in all copies.
Page 1
Seren IPS Inc.
6100130000 Rev. 0.05
To Next Page
Loading...