R301 RF POWER SUPPLY OPERATOR’S MANUAL
Glossary of Terms
A Amperes, a measurement unit of current
AC Alternating Current
ANLG Abbreviation, “Analog”
Chamber Industry term for a vacuum chamber used in plasma processing
equipment.
Common Exciter
(CEX)
A method of using an external frequency source to synchronize
the outputs of RF Power Supplies in a multi-power supply
system.
DC Direct Current
D-Sub Industry term for D-Subminiature connector
Equipotential Bond
Equipotential Bonding
Equipotential bonding (often referred to as grounding) is used
to control RF circulating currents within a system. For
regulatory purposes, it is not a “Protective Earth” or “Safety
Ground”, even though it may be bonded to the “Protective
Earth” or “Safety Ground” within the equipment or user’s
facility.
Exciter A Radio Frequency source. RF Power Supplies amplify a RF
signal source. The RF frequency signal source may be
internally generated or externally supplied. (see Common
Exciter).
Forward (net) Power
Leveling
(Forward Power) – (Reflected Power) = Net Power
Using the calculated Net Power as the feedback source for
power leveling (regulation).
FWD Abbreviation, “FORWARD”
KHz Kilo Hertz, a measurement unit of frequency (1000 Hertz)
KVA Kilo Volt-Amperes
Load Power Leveling Using the internal Forward Power sensor as the feedback
source for power leveling (regulation).
Matchbox Industry term for an impedance matching network
MHz Mega Hertz, a measurement unit of frequency (1,000,000
Hertz)
mV Milli-Volts, a measurement unit of Voltage, equal to 1/1000 of
a Volt.
Net Power The difference between forward power and reflected power.
Non-Volatile Storage Also know as non-volatile memory. Computer memory that
retains its data after power has been removed.
Page 55
Seren IPS Inc.
6100130000 Rev. 0.05
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