SEREN R301 - Product Features; R301 RF Power Supply Capabilities

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R301 RF POWER SUPPLY OPERATOR’S MANUAL

R301 Radio Frequency Power Supply Features

The R301 RF Power Supply is intended for use with radio frequency plasma processing systems

and radio frequency processing applications.

The R301 RF Power Supply provides a 13.56MHz, level-controlled radio frequency power

output up to 300 Watts. The R301 RF Power Supply provides operator-accessible controls, a

visual display of power supply status, and a control interface to the user’s processing system.

Other R301 features are listed below:

· ½ Rack, 3U High Package

· 98-125VAC or 198-250VAC AC Mains

· Crystal-controlled internal frequency source

· Bright, easy to read 4 Line Vacuum Fluorescent Display, capable of displaying Forward

and Reflected RF Power, Control Mode, Power Supply status, and RF or DC Probe

Voltage.

· Front panel controls for RF On/Off, mode selection, and programming

· Front Panel, Analog, and Serial control interfaces

· Forward Power and Load (Net) Power Leveling

· Scaleable Forward and Reflected power metering (requires interface connection to user’s

system)

· Scalable RF and DC Probe Voltage display

· Remote control operation via analog system interface connector

· Common Exciter input and output

· Voltage Probe Inverter Option Available

· Air cooled

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Seren IPS Inc.

6100130000 Rev. 0.05