R301 RF POWER SUPPLY OPERATOR’S MANUAL
Condition Suggested Solution
source signal.
Ensure the setpoint signal is connected to the Analog
Interface Connector with shielded cable.
The text “EXT” is shown on
line 2 of the front panel
display
The Analog Interface “INTERLOCK” signal is at a TTL
“HIGH” state – disabling the RF output.
Ensure the Analog Interface Connector is fully seated
Apply a TTL “low” signal to pin 2 of the Analog Interface
Connector or connect pins 2 and 15 together on Analog
Interface Connector.
The text “PAC” is shown on
line 2 of the front panel
display
The Power Amplifier’s Current limit threshold has been met
or exceeded. The RF Power Supply is now limiting forward
power to prevent the power amplifier current from
increasing.
Check the system to see if there is a problem with the load
or check the external matching network (if present) and
ensure it is operating properly.
Decrease the power setpoint.
The text “REF” is shown on
line 2 of the front panel
display
The Reflected Power Alarm threshold has been met or
exceeded. The RF Power Supply is now limiting forward
power to prevent reflected power from increasing.
Check the system to see if there is a problem with the load
or check the external matching network (if present) and
ensure it is operating properly.
The Reflected Power Alarm threshold is set too low for the
current process. Check the process specifications and/or the
Reflected Power Alarm threshold setting (refer to the
Programmable Parameters section).
Decrease the power setpoint.
The text “MAX” is shown on
line 2 of the front panel
display
The Maximum Power Limit threshold has been met or
exceeded.
The Maximum Power Limit threshold is set too low for the
current process. Check the process specifications and/or the
Maximum Power Limit threshold setting (refer to the
Programmable Parameters section).
Decrease the power setpoint.
Page 51
Seren IPS Inc.
6100130000 Rev. 0.05
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