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signal which is proportional to the mass flow rate of the gas through the tube. This 0～5 VDC signal is
compared to a set point voltage from a D08 series Flow Readout Box (or other voltage source). From this
comparison, any deviation between set point signal and measured signal are chapleted into a control valve
adjustment until two signals are identical.
D08 series is qualified with power supply, 3-1/2 digital voltage meter, and setting potential meter, inner or out
setting switch and others valve turn-on.
INT
out
INLET
I
Bypass
Sensor
Ru
Rd
MASS FLOW
CONTROLLER
Power
Readout
100.0
~220V
+15V
Power Com.
-15V
Amplifier
+5.00V
+15V
Override
Valve
Valve
Drive
OUTLET
AUTO
PURGE
-15V
OFF
FLOW READOUT BOX
(0 ~ +5.00V)
Comparator
set
EXT
SET
(0 ~ +5.00V)
Signal Com.
Output
Setpoint
Figure3. Principle of MFC
Flow test voltage output from MFC is direct ratio to the flow through the bypass, the full flow output is
corresponding DC 5V, the flow scope is (2~100) %F.S..
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