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Attention :
When Valve controller of MFC is posited on PURGE, it can be used as a MFM. When it is used as a
MFM, the flow test voltage can reach beyond +10V, but it is important, if the flow is beyond F.S. (Full
Scale), flow will not have linearity relation with test voltage. When it is purging, output flow will be
incorrect, but it is no damage to MFM itself.
There are three situations on the panel of D08 series Flow Readout box: OFF, PURGE and AUTO. When it is set
to OFF, valve of MFC will shut off; when it is set to PURGE, valve will open to the tip of flow in order to clean
the gas systems; when it is set to AUTO, valve will control the flow rate automatically.
You can control the flow on the panel of the Flow Readout box, when the set point is on the INT, flow rate can be
set by inputting the Flow Readout box a signal from remote devices, When the set point is on the EXT, flow rate
can remotely input the signal of voltage that provided by users from remote devices.
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