Table of Contents
4.4 Alignment .................................................................................40
4.4.1 Analyzer Alignment ...............................................................................40
4.5 Vacuum Installation ..................................................................41
4.6 Baking Out ................................................................................43
4.7 Electronic Units Installation .....................................................44
4.8 SpecsLab Hardware and Software Installation .......................44
5 Unit Operation 47
5.1 First Operation ..........................................................................47
5.2 Quick Start .................................................................................47
5.3 Detailed Operation ...................................................................48
5.3.1 Slit Setting ..............................................................................................48
5.3.2 Detector Operation ...............................................................................48
5.3.3 Functional Test .......................................................................................49
5.3.3.1 XPS (AES/UPS) Operation .................................................................49
5.3.3.2 ISS Operation ...................................................................................50
6 Troubleshooting 51
6.1 Short Circuits .............................................................................51
6.2 Possible Problems .....................................................................51
7 Calibration 57
7.1 Complete Calibration Procedure .............................................58
7.2 Recalibrate the DAC Precision .................................................59
7.3 MCD Calibration .......................................................................60
7.4 Work Function Calibration with UPS ......................................61
7.5 Work Function Calibration with XPS .......................................62
7.6 Offset Calibration with UPS .....................................................62
7.7 Gain Calibration with XPS ........................................................64
8 Analyzer Checks 65
8.1 Independence of Peak Position with Pass Energy ..................65
8.2 Energy Scale Tests with XPS .....................................................66
8.2.1 Check Kinetic Energy Scale ....................................................................66
8.2.2 Check Peak Position ...............................................................................66
8.3 Specification Check ...................................................................67
8.3.1 Survey Spectrum of Silver ......................................................................67
8.3.2 Intensity and Resolution ........................................................................68
8.4 Connection Check of the Analyzer Electrodes .......................70
8.4.1 Capacitance Check for Electrodes .........................................................71
8.4.2 Check the Cable Contacts ......................................................................71
8.5 Check all analyzer voltages ......................................................73
PHOIBOS
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