Unit Operation
5.3.3.2 ISS Operation
Please read these instructions carefully. Damage of channeltrons and ampli-
fier are possible if the following is done incorrectly!
Set the detector voltage to the value corresponding to the Specification Report of the
analyzer or check the actual value (“The Working Point of the CEM’s” on page 27).
The conversion voltage (BIAS) in the Analyzer Settings window is default set to 2000
(see section 3.5.4, “Conversion Energy” on page 32).
The excitation source should be degassed and run under proper conditions to avoid
structures due to possible residual gas inside the sputter line.
Switch the method to ISS mode in SpecsLab.
Recommended lens mode: Point Transmission.
Optimize the excitation source with typical sample current of less than 1 μA. Select the
FixedEnergies Analyzer Mode and choose a kinetic energy with measurable counts to
maximize intensity with the source deflection tools.
Check the function with an overview spectra.
50 PHOIBOS
Point Transmission
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