Vacuum Installation
throughs are fixed with the locking screw during transport. Make sure to unlock
them before using the rotary feedthroughs and lock them again afterwards.
13. Adjust the analyzer at the vacuum chamber flange (Check section 4.4 “Align-
ment” on page 40).
14. Bolt the analyzer at the vacuum system flange with the delivered screws, wash-
ers and nuts.
15. For PHOIBOS150 and μ-metal chambers: Do not release the lifting gear until the
analyzer is supported by an additional supporting post!
16. Check the physical stability of the supporting post and the system frame and re-
lease the lifting gear.
17. Use the iris aperture and the analyzer view port to locate the real center posi-
tion of the lens with respect to the desired acceptance area on the sample.
18. Evacuate the chamber to a pressure of below 10
-5
Pa (10
-7
mbar) and bake out
(see section 4.6 “Baking Out” on page 43).
19. Check the vacuum before and after bakeout.
20. Connect the analyzer as described in the analyzer manual. (Figure 2: Connec-
tion Scheme page 7)
21. Before operating the analyzer wait for complete cool down (good thermal insu-
lation inside the analyzer leads to a complete cool down time of about 2-3 days,
at least 2 days cool down is recommended).
4.6 Baking Out
The vacuum chamber has to be baked out to get good UHV in a reasonable time. The
temperature during the bake can be up to 200° C. A reference thermocouple for the
temperature measurement should be attached to the detector flange (figure 24)!
Figure 24: Detector Flange
Before baking out:
● Switch off the HSA3500 control unit.
● The analyzer box (fixed at the lens housing, see figure 4) should be removed as
well as,
● the detector box (preamplifier) with connection cables (Channel HV, Channel
Base, CAN)
PHOIBOS 43
Thermocouple here
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