Energy Scale Tests with XPS
Cu L3MM 334.94 ± 0.01 567.96 ± 0.02
Table 14: Calibration Binding Energies for non-monochromated Mg Kα X-rays
8.3 Specification Check
8.3.1 Survey Spectrum of Silver
The XPS performance of an energy analyzer is usually determined using a silver sample.
A clean silver sample is introduced into the vacuum chamber and cleaned by ion sput-
tering. Use the same settings as in the overview spectrum of silver enclosed with the
Specification Report on the analyzer. For example:
Excitation Mg Kα
X-ray power 300 W
Slit entrance: largest slit / exit: open
Mode Medium Area
Binding energy range 1000 - 0 eV
Energy step ~300 meV
Dwell Time 100 ms
Pass energy ~13 eV
A typical XPS overview spectrum taken with a PHOIBOS analyzer on silver is shown be-
low (figure 31).
PHOIBOS 67
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