Introduction
bus interface. All parts are integrated into a single, compact RF-shielded aluminum
case. The detection electronics are supplied together with the analyzer control unit.
PHOIBOS analyzers provide the detection of electron and ion energies between 0 and
3500 eV with minimum step widths of 7 meV. For ultra high energy resolution applica-
tions the unit can be operated in a 400 V or a 40 V range with extremely low ripple.
Step widths down to 80μV are possible in the lowest voltage range.
A multi-element, two-stage transfer lens can be operated in several different modes for
angular and spatially resolved studies. All lens modes can be set electronically. A Slit-Or-
bit mechanism and a Multi-Mode Lens make the sampling area of the analyzer and the
acceptance angle area of the lens selectable. Thus the analyzer allows spatially resolved
measurements down to a diameter of 100 μm as well as large area investigations associ-
ated with different lens acceptance angles.
All units are completely controlled by SPECS software. Operation of the software will be
described in a separate manual.
Typical uses of the PHOIBOS analyzer include photoelectron spectroscopy (XPS, SSXPS,
UPS), Auger electron spectroscopy (AES, SAM) and ion scattering spectroscopy (ISS). The
PHOIBOS analyzer is bakeable up to 200°C after removal of the detector electronics and
the connection for the lens supply.
2 PHOIBOS
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