Spectra Precision FOCUS 30 User Guide 55
4 Setup
Optical Collimation
The workflow is structured as follows:
Screen Actions and Comments
Fig. 4-41 Collimation conditions
Make sure to measure with the stated conditions.
Fig. 4-42 Optical Collimation measurements
Make the measurements per the displayed
information and confirm and store the values.
Fig. 4-43 Optical Collimation / Trunnion Axis
Decide per the displayed information for
trunnion axis tilt collimation or confirm and
store the new values for optical collimation.