Appendix A
52 HA0338T Rev C July 2022
Appendix A Specifications
A.1 Stage Specifications
1
Bi-directional repeatability and accuracy will be the same if Backlash Correction is
enabled in the APT Software.
2
Min. Repeatable Incremental Movement is the smallest controlled movement that
the stage can be positioned repeatedly where the error is less than 10% of the
specified step size at a 99.5% confidence level.
Parameter Value
Travel Range 360° Continuous
Max Speed 10 °/s
Min Speed 0.005 °/s
Max Acceleration 20° /s/s
*Note
The acceleration is limited by the motor force, and must be reduced for higher loads.
Unidirectional Repeatability
1
± 60 µrad
Backlash ±200 µrad
Resolution (Theoretical) 0.0000073° (0.128 µrad)
Min. Repeatable Incremental Movement
2
0.03°
Maximum Load Capacity 22 N (see Section A.3.)
Absolute Accuracy
1
±0.14°
Home Location Accuracy ±100 µrad
Max Wobble (Axial) 500 µrad
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