VAT 612 Series - Installation Space Condition; Connection Overview

Series 612 INSTALLATION
605262EE Edition 2018-08-20 17/
116
4.2.1 Installation space condition
Install the valve with integrated controller with space for dismantling and air
circulation as shown in figure below.
Sample picture
4.2.2 Connection overview
System:
1 Valve with controller and actuator
2 Process chamber
3 Gas inlet
4 Pressure sensor(s)
5 Sensor cable
6 Cable to remote control unit
7 Cable to power supply
8 HV Pump
70 mm
M
3
4
5
6
7
2
1
8