MAINTENANCE  Series 
 
94/116
Edition 2018-08-20  605262EE
 
7.2.1  Replacement of shaft feedthrough seals and valve cleaning 
7.2.1.1  Required tools 
 
• 
Allen Wrench 2 mm / 2.5mm 
• 
Allen Wrench 3 mm 
• 
Feeler gauge 
• 
Clean room wipes, isopropyl alcohol 
• 
Vacuum grease 
 
Description 
Required tool 
 
Make sure that the valve is in closed position 
1.   
 
Vent vacuum system, disconnect electrical connections and remove valve from vacuum 
system. If you only replace control and actuating unit, the valve can remain in the 
system. 
Take care not to damage sealing surface! 
Do not move the plate by hands when control an actuating unit is installed. 
Depending on 
flange screws 
2.  Unfasten clamp coupling 
 
Allen Wrench: 
 
elastic coupling
2 mm 
 
steel coupling 
2.5 mm 
 
3.
Unfasten the 2 connection bolts and separate 
Valve size DN 160 (6”) and bigger require 
a shortened wrench. For ordering number 
refer to «Spare parts and accessories». 
 
 
Allen Wrench 
3 mm 
4.  Unfasten screws and remove plate from shaft. 
 
Allen Wrench 
3 mm 
12 mm