Series 612 MAINTENANCE
605262EE Edition 2018-08-20 95/
Description
Required tool
5.
Unfasten alternately the 2 mounting screws
little by little.
Allen Wrench
3 mm
If only one screw is fasten / unfasten,
the mechanical unit will be damaged.
Max. difference should be less than 1
turn or 0.5 turn of the screws.
6. Remove mechanical unit and clean shaft.
7. Remove o-rings.
8. Clean shaft feedthrough and valve body.
isopropyl alcohol
9. Lubricate seal contact surface of valve body
with a slight film of vacuum grease (0.025 ml).
10. Lubricate each o-ring with a slight film of
vacuum grease (0.0125 ml).
Vacuum grease
11. Lubricate seal contact surface of shaft with a
slight film of vacuum grease (0.0125 ml).
12. Slide both o-rings onto shaft till the end.
13. Deposit 0.0375 ml vacuum grease between the
o-rings
14. Clean shaft from vacuum grease.
Vacuum grease
Clean room wipes
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