Chapter 3 51
Agilent 4072/4073 Preinstallation Guide, Edition 4
Wafer Probers and Connection with Testhead
Connecting with Testhead
Connecting with Testhead
There are two types of interfacing techniques used between the testhead and the wafer prober:
• Mounting the Testhead on the Wafer Prober
Mounting the testhead on the wafer prober. A probe card direct docking, or a personality board and probe card
are normally used to interface between the measurement pins of the testhead and probe needles.
• Placing the Testhead beside a Manual Wafer Prober
Placing the testhead beside the wafer prober. An Extension cable fixture, connector plate and so on are used to
interface between the measurement pins of the testhead and probe needles.
Probe card for direct docking
To improve low-leakage performance, you can use a probe card designed for direct docking. Direct docking means
that the measurement pins of the testhead directly contact the probe card, which reduces the leakage current.
NOTE Agilent Technologies recommends the use of the direct docking probe card when using the
4073A/B.
The 4073A/B may not fully perform if a personality board or extension cable fixture is used.
Figure 3-8 Probe card for direct docking
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