44 Chapter 3
Agilent 4072/4073 Preinstallation Guide, Edition 4
Wafer Probers and Connection with Testhead
Wafer Probers
Wafer Probers
The Agilent 4072/4073 tester is typically used with a wafer prober as most of the devices under test (DUTs) are on
a wafer. You can use automatic and semi-automatic wafer probers and manual wafer probers with the 4072/4073
tester.
NOTE The wafer prober used with the 4072B/4073B must be the low noise prober for the capacitance
measurement. For the details, contact the wafer prober manufacturer.
Mounting testhead on wafer prober
Most automatic or semi-automatic wafer probers have a mechanism to mount a testhead using mounting hardware,
such as a manipulator or hinges (clam shell type). Figure 3-1 shows an example of a wafer prober with the testhead
mounted using a manipulator.
Mounting mechanism
Figure 3-1 Mounting mechanism
For a manipulator-type mounting mechanism, the testhead is attached to the arm of the manipulator. You just push
the testhead down on the wafer prober, and then fit it to the interface using the clamping mechanism.
For a hinge-type mounting mechanism, the testhead is fixed to a hinge arm. You just rotate the hinge arm to put the
testhead on the wafer prober (this movement is similar to the clam shell), and then fit the testhead to the interface
using the clamping mechanism.
There are two guide pins on the testhead, as shown in Figure 3-2
. These pins are used to position the testhead on
the wafer prober correctly.
To assist you in mounting your testhead on a wafer prober, Figure 3-3 to Figure 3-6 show the testhead dimensions
for the 4072/4073 tester.
For details on how to mount a testhead, contact the wafer prober manufacturer.
Manipulator
Hinge
Testhead
Testhead
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