Chapter 3 53
Agilent 4072/4073 Preinstallation Guide, Edition 4
Wafer Probers and Connection with Testhead
Connecting with Testhead
Wiring for personality board
The customer is responsible for the wiring between the personality board and the probe card. The prober
manufacturer or its representative can help you obtain the probe card, insert ring, low leakage socket assembly,
probing needles, and so on.
The pin board configuration table in Table 3-1 indicates which testhead slots will have pin boards installed at the
factory. The pin board locations should not be reconfigured. The slot numbers in the table correspond to pin
numbers on the personality board that should be used to connect to the probe card.
Figure 3-10 Wiring for personality board
To assist you in interfacing the testhead with a wafer prober, Figure 3-11 shows the Agilent E3145A/B personality
board dimensions.
The E3145A is designed for non-Kelvin connections, so that the force and sense terminals for each pin are closed
on the personality board. The E3145B is for Kelvin connections, so that the force and sense terminals are separated.
personality board
probe card
insert ring
socket assembly
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