7 CI Maintenance
224 5977B Series MSD Operating Manual
To Install a CI Source Filament
Materials needed
• Filament assembly, 2-pk, CI (G7005-60072)
• Gloves, clean, lint-free (Large 8650-0030) (Small 8650-0029)
• Tweezers (8710-2460)
Procedure
1 Remove the old filament. (See “To Remove the CI Source Filament” on
page 223.)
2 Place the new filament into its position on the ion source body. (See
Figure 73 on page 223.)
3 Secure the filament to the ion source body with the screw. (See Figure 73 on
page 223.)
4 After installing the filament, verify that it is not grounded to source body.
5 Reinstall the CI source. (See “To Install the CI Source” on page 225 or
“General Information” on page 198.)
6 Pumpdown the MSD. (See “To Pumpdown the MSD” on page 116.)
7 Autotune the MSD.
To Next Page
Loading...
Need help?
General
