Technical Information
Technical Specification
248/304 TwisTorr 304 FS User Manual / 87-901-027-01
Technical Specification
• Max gas throughput:
o water cooling (water temperature=25°C; backing pump 5 m
3
/h)
o air cooling (ambient temperature 25°C; backing pump 5 m
3
/h)
Technical Specification
Pumping speed
N
2
He
H
2
Ar
ISO 100 / CF 6”
250 l/s
255 l/s
220 l/s
250 l/s
ISO 160 / CF 8”
250 l/s
255 l/s
220 l/s
250 l/s
Max gas throughput at full rotational speed
(with recommended forepump)
N
2
Ar
Air cooling
170 sccm
110 sccm
Water cooling
170 sccm
110 sccm
Compression ratio
N
2
He
H
2
Ar
>1 × 10
11
>1 × 10
8
1.5 × 10
6
> 1 × 10
11
Base pressure with recommended forepump
< 1 x 10
-10
mbar
(< 1 x 10
-10
Torr)
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after the
completion of test dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the recommended pre-
vacuum pump)
Inlet flange CFF 8" O.D. ISO 160
CFF 6” O.D. ISO 100
KF16 NW (KF25 – optional)
Rotational speed 60000 rpm (1010 Hz driving frequency)
Start-up time
< 3 minutes
Recommended forepump mechanical: Agilent DS 102
mechanical: Agilent DS 302
dry pump: Agilent SH 110
Operating position Any
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