Technical Information
Technical Specification
250/304 TwisTorr 304 FS User Manual / 87-901-027-01
Split Flow (X3500-64010) Technical Specification
Pumping speed *
N
2
He
H
2
Ar
Main Flange (ISO 100)
220 l/s
215 l/s
215 l/s
210 l/s
Side Port (KF40)
5 l/s
6.5 l/s
7 l/s
4 l/s
Compression ratio
N
2
He
H
2
Ar
Total
>1 × 10
11
1 x 10
7
1.5 x 10
5
>1 × 10
11
Foreline/Side Port
>1 x 10
6
2.5 x 10
4
1 x 10
3
>1 x 10
6
Max gas throughput at full rotational speed
(with recommended forepump)
N
2
Ar
Air cooling/Water cooling
170 sccm
110 sccm
* Pumping speed measured with fluximeter.
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