Agilent Technologies X3500-64000

17
Technical Information
Pump Used with Corrosive Gases
296/304 TwisTorr 304 FS User Manual / 87-901-027-01
Figure 56
Purge layout
1 Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve