Amtech
6-102
6
E103: Table2 Step Selection
Select the number of steps for table-2 for RSF.
E104: Table3 Step Selection
Select the number of steps for table-3 for RSF.
E105: Doff End Alarm Time (Sec)
By setting the Doff-End Alarm Time, the Doff-End Alarm is output at the point going back the set time
(E105) from the moment auto stop occurs after completion of the final step when performing spinning
frame operation.
E106: Hank count gain
This is the gain, which is used in hank calculation.
E107: Hank Gain Multiplier
Select the multiplier for the hank gain.
E108: Table selection
Select the Table for RSF and Pattern Run function.
GROUP-2: RSF FREQUENCY FOR TABLE-1
E201- E215: Frequency T1 – STP1 ~ STP15 (Hz)
Enter the frequencies for table-1.
GROUP-3: RSF TIME FOR TABLE-1
E301- E315: RSF time T1 – STP1 ~ STP15 (Sec)
Enter the time to reach to the set frequency for each step for table-1.
GROUP-4: RSF FREQUENCY FOR TABLE-2
E401- E415: Frequency T2 – STP1 ~ STP15 (Hz)
Enter the frequencies for table-2.
GROUP-5: RSF TIME FOR TABLE-2
E501- E515: RSF time T2 – STP1 ~ STP15 (Sec)
Enter the time to reach to the set frequency for each step for table-2.
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