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Atmospheric Single-Arm Robot Maintenance
User’s Manual Cleaning
Brooks Automation
Revision 1
9-5
3. Once all contaminants have been removed, use cleanroom wipes moistened
with DI water to remove any residues.
CAUTIONS
Wipe must be moistened only; squeezing the wipe should not cause
any water to drip.
Do not allow water to come in contact with bearings, seals, etc.
4. Once all residues have been removed, use dry cleanroom wipes to dry all sur-
faces.
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

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