Cosmos PS-7 - 3.1 End of Line Filter Use

8
DC-ITD-PS7MAN01.A www.dodtec.com
JAN 2019 815-788-5200
PS-7 Manual
3.1 End of Line Filter Use
PN: 780248
PN: 60009
PN: 2-800-013
Use with
Use with:
Use with:
AsH3
BCl3
BCl3
COCl2
Bf3
Bf3
C4F8
Cl2
Cl2
C5F8
DCS
DCS
B2H6
HBr
HBr
H2S
HCl
HCl
H2Se
HF
HF
GeH4
SiCl4
SiCl4
CH4
SiF4
SiF4
IPA
WF6
WF6
CH2F2
POCl3
POCl3
CH4
Hydrazine
Hydrazine
CHF3
NH3
NH3
CO
O3
O3
H2
NF3
PH3
SiH4
O2