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STP-iS2207C
Edwards STP-iS2207C User Manual
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STP-iS2207 Series Tu
rbomolecula
r Pump
MT-89E-001-C
Page v
PAGE
v
CONTENTS (CONTINUED)
Section
Title
Page
9
STORAGE AND DI
SPOSAL
151
9.1
Storage of the ST
P pump
151
9.2
Disposal
152
10
SERVICE, SPAR
ES AND ACC
ESSORIES
153
10.1
Introduction
153
10.2
Service
153
10.3
Spares
153
10.4
Accessories
154
6
8
Table of Contents
Table of Contents
3
Introduction
11
Scope and Definitions
11
Applied Standards
12
Limited Warranty
13
Warranty Period
13
Item Warranted
13
Disclaimer
14
Spare Parts
14
Precautions for Safe Operation of the STP Pump
15
Usable Gases
15
Maintenance and Inspection Precautions
16
Labels
16
STP Pump Installation Warning Label
16
Hot Surface Warning Label
16
Heavy Product Caution Label
17
High Voltage Device Caution Label
17
Operation Principle of the STP Pump
18
STP Pump Specification
20
Technical Data
21
STP Pump Specifications
21
Maximum Gas Flow-Rate
22
Water Cooling Use Condition
23
Control Unit
24
External Appearance of the STP Pump
26
External Appearance of STP-Is2207
26
External Appearance of STP-Is2207C
27
Label Affixing Positions
28
Installation of the Stp Pump
29
Precautions before Installation
29
Operating Environment
29
Installation Area
31
Space Around the STP Pump
31
Bench
32
Insulation Test
32
Unpacking and Installation
33
Example of Lifting the STP Pump
33
Eye Nut Size
33
Example of Lifting the STP Pump (Horizontal Positioning)
34
STP Pump with Eyebolts
36
Name and Function of each Part
37
Name and Function of the Pump
37
Configuration of the STP Pump
37
Control Unit (Front Panel)
37
Pump Functions
37
Name and Function of the Control Unit
38
Control Unit Front Panel Functions
40
Control Unit Front Panel Functions (Continued)
41
How to Install the STP Pump
42
Installation of the STP Pump to the Vacuum Equipment
42
Cleaning the Seal
43
STP Pump Installation Positions
44
Positions of the Outlet Port on the Horizontally
44
Secure the STP Pump
45
Tightening Torque of Bolt
45
Maximum Torque Predicted and Recommended Securing Bolt
46
Legs for Securing the Base
49
Screw Holes for Securing the Base
49
Power Cable
50
How to Connect the Power Cable
52
Precautions of Vacuum Piping
54
Vacuum Piping Method
55
(For the STP Pump Equipped with Purge Port)
55
Height of Purge Port
55
Connecting the Water Cooling Pipe
56
Positions of the Cooling Water Port
56
Attaching a Baking Heater
57
Connecting to Semiconductor Equipment
58
Connecting to Power
58
Emergency off Circuit (EMO Circuit)
58
Operation
59
Gas Pumping, Cooling and Baking the STP Pump
59
Gas Pumping
59
How to Introduce a Purge Gas
60
Cooling the STP Pump
60
Water-Cooling Method
60
Baking the STP Pump
61
Before Starting the STP Pump
62
Confirmation before Starting
62
Confirmation of Vacuum System
62
Powering on
63
Pump Operation
63
Input Operation Port Setting
63
Starting/Stopping the STP Pump
64
Pump Operation Method
64
Starting/Stopping the STP Pump (X2 REMOTE)
64
How to Start/Stop the STP Pump
65
Starting the STP Pump after Stopping
65
Starting the STP Pump after a Safety Function Operates
65
Powering off
65
Reset Operation (X2 REMOTE)
65
Led
66
Parallel Port Input/Output Signal
67
Input Signal Pins
67
X2 REMOTE Connector
67
X2 REMOTE Input Signal Pins
68
X2 REMOTE Input Signal Pins (Contact Input)
69
Input Operation Port Setting
70
Second Speed Option
71
Output Signal Pins
72
X2 REMOTE Output Signal Pins
74
Serial Communication Protocol
77
Introduction
77
Serial Port
77
Connection and Setting up
78
Signal Connection
78
X3 Pin Position
78
Connecting the RS485
80
Communication Parameter Setting
81
Communication Parameters
81
Input Operation Port Setting
82
Input Operation Port
82
Serial Communication Timeout Setting
83
Serial Communication Time out Setting
83
Recommended Items about Communication Cable Installation
84
Grounding Example (both Ends Grounding)
84
Grounding Example (Single Point Grounding)
84
Protocol Specifications
87
General Description
87
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)
88
(In the RS232/RS485 Single Point Connection)
89
Query Command
90
(In the RS232/RS485 Single Point Connection)
90
Transmission Data Format
91
Frame Control (Checksum)
92
Error Control
92
Transmission Frame in the RS485 Multi-Point Connection
92
Control Command in the RS485 Multi-Point Connection
94
5.3.10 Query Command in the RS485 Multi-Point Connection
95
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection
96
Pump Operation Commands
96
5.3.12 Application Note
97
Example of Answer Resending Process
98
Example of Command Sending During Answer Data Reply
98
Command Specifications
101
Command List
101
Readmeas
102
Command
102
Readfailmess
103
Pump Operation Commands
103
Error Message Values
106
Readmodfonct
107
Pump Operation Mode
108
Readversion
109
Readcounters
110
Readsetpoint
111
Readmotortemp
111
5.4.10 Readstatus
112
5.4.11 Readevents
113
Remote Mode
113
5.4.12 Setspeedsetpoint
114
5.4.13 Readspeedsetpoint
115
5.4.14 Readmodfonctwithwarning
116
Warning Value Bit Assign
117
5.4.15 Readmeasvalue
119
5.4.16 Readoptionfunc
121
Input Operation Port Setting
121
5.4.17 Setoptionfunc
124
5.4.18 Readcondition
126
5.4.19 Readeventswithtime
128
5.4.20 Setoptions
132
Second Speed Option Setting
132
Option Function Number and Parameter List
132
5.4.20.2 Second Speed Selection
133
5.4.21 Readoptions
134
5.4.21.1 Second Speed Function Setting
134
5.4.21.2 Second Speed Select
135
Stp-Link and Display Unit
137
STP-Link
137
Display Unit
138
Safety Functions
139
Power Failure
139
Operation after a Power Recovery
140
Abnormal State of Magnetic Bearing (Disturbance)
141
Excessive Vibration (Disturbance)
141
Motor Driver Overload (DRV Overload)
141
Overheating Inside the STP Pump (MOTOR Overheat)
141
Overheating Inside the Control Unit (CNT Overheat)
141
Overspeed
142
WARNING" Function
142
WARNING Function
142
Contents of WARNING Function
144
First Damage Limit
144
Second Damage Limit
144
Pump Run Time over
144
Pump Overload
145
Imbalance
145
Other Warning
145
WARNING Function Setting
146
Default Setting of WARNING Function
146
Factory Setting and Variable Range
146
Troubleshooting Immediately after Failure Occurs
147
After Power Failure
147
After Other Abnormality/Error
147
Troubleshooting
148
Indication of "FAILURE" LED (Red)
148
Indication of "FAILURE" LED (Red)
154
No Indication of the "FAILURE" LED
154
Maintenance and Inspection
155
Cleaning
156
Inspecting the Deposit
156
Maintenance
157
Recommended Overhaul Intervals
157
Standard Replacement Parts
157
Recommended Maintenance Intervals for Main Parts
158
Transporting for Repair or Overhaul
159
Storage and Disposal
161
Storage of the STP Pump
161
Disposal
162
Service, Spares and Accessories
163
Introduction
163
Service
163
Spares
163
Accessories
164
4
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Edwards STP-iS2207C Specifications
General
Brand
Edwards
Model
STP-iS2207C
Category
Water Pump
Language
English
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