STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 6
2 Hot surface warning label 6
3 Heavy product caution label 7
4 High voltage device caution label 7
5 Rotation instruction label 7
6 Cross sectional view of the STP pump 8
7 External appearance of STP-iS2207 16
8 External appearance of STP-iS2207C 17
9 Label affixing positions 18
10 Space around the STP pump 21
11 Example of lifting the STP pump 23
12 Example of lifting the STP pump (horizontal positioning) 24
13 Jack-up the STP pump 25
14 Control unit bottom face 25
15 STP pump with eyebolts 26
Configuration of the STP pump 27
17 Control unit (Front panel) 29
18 Installation of the STP pump to the vacuum equipment 32
19 STP pump installation positions 34
20 Positions of the outlet port on the horizontally
or slanted installed STP pump 34
21 Bolt position for securing the flange 38
22 Methods of securing the STP pump 38
23 Screw holes for securing the base 39
24 Power cable 40
25 Connecting method of the power cable 41
26 Height of purge port 45
27 Positions of the cooling water port 46
28 Baking heater installation position 47
29 Pump operation method 54
30 "ROTATION" LED Indication 56
31 X2 REMOTE connector 57
32 X2 REMOTE input signal pins (contact input) 59
33 X2 REMOTE output signal pins 64
34 Serial port 67
35 X3 connector (D-Sub9) 68
36 RS485 connections 70
37 Grounding example (Both ends grounding) 74
38 Grounding example (single point grounding) 74
39 Example of ring ferrite core installation 75
40 Example of cable installation in metallic duct 75
41 Example of differential signal waveform 76
42 PC to SIM communication 77
43 Block diagram of communication process example 87
44 Example of answer resending process 88
45 Example of response when the command is sent continuously 88
46 Example of command sending during answer data reply 88
47 Example of communication cycle process 89
48 Example of command sending process 90
49 Example of answer receiving process 90
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